Home | 기술자료 | e-KAISER Ek-9501series
Introduction to
e-Kaiser ® Ek-9501 is a new beige-colored Perfluoroelastomer compound.
- High Temperature Resistance (>320℃)
- Excellent Plasma Resistance
- Low extractable metal ion
- Better heat resistance with some grades
- Better resistance to some aerospace fluids
Typical Physical Properties:
Elastomer Type | FFKM | |
Color | Beige | |
Hardness , Shore A | Pts. | 76 |
Tensile Strength | MPa | 10.3 |
Elongation at Break | % | 200 |
Modulus 100% | MPa | 5 |
Compression Set, Max 230Ⓒ60hrs 316Ⓒ60hrs |
% | 34 55 |
Applications:
- Deposition ( CVD ,PECVD,HDPCVD )
- Metallization ( PVD,CVD…)
- Door ,Slit valve , Lid , Windoes , Gas inlet
- Isolator valves
This Perfluoroelastomer, e-KAISER®Ek-9501 is a newly
introduced product that specially developed for semiconductor or
LCD manufacturing process which needs specific requirements under severe environment.
This indicates that the composition of Ek-9501 could negatively impact
performance as for high temperature and plasma or different type of gases.
Parts made from Ek-9501 compound based system have the
ability to withstand continuous, in-service temperatures up to 300℃,
with peaks up to 320℃
The finished parts also feature improved compression set, for longer seal life and better sealing force retention